q_#1_#2...txt contain the measured quality factors of modes of 2.6 mm beams (Frequency [Hz] and Quality factor columns).
	#1 denotes the SiN thickness in nm
	#2 denotes the numbers of unit cells each side of the defect

q_..Sel.csv contain sub-sets of the modes (in the same format) with frequencies inside the phononic bandgap.

For example
q_20_13 - quality factors of 20-nm thich beams with 26 phononic unit cells in total